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Mass flow controller
Mass flow controller & Mass flow meter
A mass flow controller is a device used to control the flow rate by measuring the mass flow rate of fluid and gases with high accuracy. Because it is not required to be corrected due to the change of temperature or used pressure while volume flow from flow meters and needle valves, are required to be corrected due to the change of temperature or pressure. Mass flow controllers and mass flow meters have been used for the field of semiconductor and flat panel display that require the high accuracy of measurement and control as well as in the field of analysis, fuel cell, liquid crystal, organic EL, biotechnology, food, environmental measurement, combustion gas control, factory equipment, laboratory equipment and etc.
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